NoelTech

PVD Metals

Noel MRC Systems provide 300mm and smaller diameter deposition of Titanium, Titanium Nitride, and Aluminum (99.999% Pure).

PVD Thin Film Metals

Noel operates 2 MRC Systems that provide 300mm and smaller diameter deposition of Titanium, Titanium Nitride, and Aluminum (99.999% Pure). Low Particle Processing utilizing a Vertical Palette Loading System. Used in Semiconductor, Bio-Medical, MEMS and many more applications.

Noel’s 2um Al is a pristine, shiny film, without haze.

Film Thickness

Ti
200A to 3KA
TiN
250A to 3KA
Al
500A to 2um

Wafer Diameter

50mm
2 Inch
100mm
4 Inch
125mm
5 Inch
150mm
6 Inch
200mm
8 Inch
300mm
12 Inch

Film thickness is measured on an Alpha Step or P-15 Profiler, on a sample substrate or a coupon to confirm the thickness and tolerance. 

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